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鎷旂墮鎴戝�戦渶瑕佹敞鎰忓摢浜涘憿锛熸湁鍝簺璎涚┒鍛�锛�
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1.瑭﹁憲鍦ㄦ棭涓婃嫈鐗� 鎷旂墮鏅傞枔寰堝彲鑳芥渻閫犳垚灞�閮ㄧ祫绻旀悕鍌�锛屽紩璧峰嚭琛�銆佽叓鑴瑰拰鐤肩棝绛夌櫏鐙�锛屾湁鏅傛渻灏�(d菐o)鑷磋澹撱�侀珨婧�銆佽剤鎼忔尝鍕曪紝鍥犳涓�鑸墮閱�(y墨)寤鸿鎮ｈ�呮棭涓婃嫈鐗�锛屽洜?y脿n)鐛抰(y墨)鐢熷拰鎮ｈ�呮棭涓婄殑楂斿姏鍜岀簿鍔涙洿濂�锛屾矑鏈夊闁撶墮绉戣ê鎵�瑷烘柗锛屽鏋滀笅鍗堟嫈鐗欎竴鏃﹀嚭鐝�(xi脿n)锛岃(sh霉)鍚庡嚭琛�锛岀劇娉曞強鏅傝檿鐞�銆�
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闂�(gu膩n)閸佃锛�
鏅洪綊 鎷旂墮 鍙ｈ厰澶栫
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1.蹇冭绠＄柧鐥呮偅鑰� 蹇冭绠＄柧鐥咃紙CVD锛夋偅鑰呮嫈鐗欏墠瑕侀�氱煡閱�(y墨)鐢�锛屼竴鑸矑鏈夊績鍔熻兘涓嶅叏鐨勮贰璞″彲浠ユ嫈鐗欙紝浣嗘嫈鐗欐檪楹婚唹鍔戝皣鐒℃硶娣诲姞鑵庝笂鑵虹礌锛屾垨鑰呭彲鑳芥槸蹇冨嫊閬庨�熻獦鐧�(f膩)鐨勫績鍔涜“绔�锛屼篃绲︿簣鎶楁劅鏌撴不鐧傦紝蹇冭嚐鐥呮偅鑰呮嫈鐗欏墠鍚庢姷鎶楄兘鍔涜純浣�锛屾瘮姝ｅ父浜烘洿瀹规槗鐧�(f膩)鐢熷叡鍚屾劅鏌�銆�
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闂�(gu膩n)閸佃锛�
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闂�(gu膩n)閸佃锛�
鏅洪綊 鍙ｈ厰澶栫 鎷旂墮
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鎴戝�戞湁鍝簺鎯呮硜涓嶈兘鎷旂墮鍛紵闇�瑕佹�庝箞娉ㄦ剰锛�
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闂�(gu膩n)閸佃锛�
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闂�(gu膩n)閸佃锛�
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